Description
LAM 810-002895-002
Functional Features:
- Precision Regulation: Delivers highly accurate and repeatable gas flow rates with minimal drift.
- Fast Response Time: Rapidly adjusts flow to accommodate dynamic process recipe changes.
- Corrosion Resistance: Wetted parts are constructed from materials resistant to aggressive semiconductor process gases.
Application Scenarios:
Used in gas delivery systems for plasma etching, CVD, and atomic layer deposition (ALD) tools.
Performance Parameters:
- Flow Accuracy: Typically ±1% of full scale or better.
- Response Time: Millisecond-level response to setpoint changes.
Material Composition:
Features stainless steel wetted parts, elastomer seals compatible with corrosive gases, and precision solenoid valves.
Structural Characteristics:
Compact, integrated module with electrical and pneumatic interfaces designed for easy replacement and maintenance.
Working Principle:
Compares the actual gas flow (measured by a thermal or differential pressure sensor) against the desired setpoint, and dynamically adjusts a proportional valve to correct any deviation.
Installation Requirements:
Ensure gas lines are completely clean and purged before installation. Verify gas type compatibility with the module’s wetted materials.
Usage Precautions:
Do not exceed the maximum rated pressure. Perform regular leak checks and zero-calibration to maintain process integrity.
