ZYGO 4104C
ZYGO 4104C - Image 2

ZYGO 4104C

Product Introduction:
The ZYGO 4104C is a high-precision measurement electronics board and a core component of displacement measurement interferometer systems. It is responsible for processing and analyzing signals from ZYGO interferometers, achieving ultra-high-precision displacement measurement at the nanoscale for semiconductor manufacturing and scientific research.

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Category: SKU: ZYGO 4104C

Description

ZYGO 4104C

Technical Specifications:

  • Displacement Measurement Resolution: Sub-nanometer (accurately measures changes as small as 0.1 nm).
  • Measurement Axes: Supports up to 4 independent axes simultaneously.
  • Primary Interface: VME (VersaModule Eurocard) standard interface.
  • Secondary Interfaces: RS232 and RS485 for legacy compatibility.
  • Optical Measurement Range: 0.1 nm to 6.5 mm (when used as an optical surface measuring instrument).
  • Measurement Accuracy: 0.01 nm.

Functional Features:

  • Multi-Axis Capability: Connects up to four interferometers for comprehensive multi-dimensional displacement tracking.
  • Ultra-High Resolution: Captures extremely subtle displacement differences essential for nanotechnology and semiconductor lithography.
  • Flexible Connectivity: Combines high-speed VME data acquisition with standard serial ports for broad system integration.

Application Scenarios:
Critical in semiconductor manufacturing, precision machinery processing, optical component surface measurement, and advanced scientific research requiring strict nanoscale precision.

Performance Parameters:

  • Measurement Time: Flexible selection between 5 and 60 seconds depending on accuracy requirements.
  • Light Source Compatibility: Designed to process signals from highly stable HeNe lasers.

Material Composition:
Manufactured with high-grade electronic components and precision PCBs designed for low-noise signal processing and high-speed data acquisition.

Structural Features:
Standardized VME board form factor with robust connectors, designed to be integrated into high-performance data acquisition and control racks.

Working Principle:
Receives optical interference signals from connected interferometers, converts them into digital data, and applies advanced algorithms to calculate precise displacement or surface topography with sub-nanometer resolution.

Installation Requirements:
Must be installed in a standard VME chassis. Ensure proper grounding and shielding to prevent electromagnetic interference from compromising the sub-nanometer resolution.

Usage Precautions:
Handle with strict ESD precautions. Ensure all optical fiber connections to the interferometers are clean and secure to maintain signal integrity.

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