Description
ZYGO 4205
Technical Specifications:
- Measurement Precision: Sub-nanometer level accuracy for optical surface profiling.
- Light Source: Highly stable Helium-Neon (HeNe) laser.
- Detector: High-sensitivity CCD camera for rapid signal capture.
- Operating Temperature: 15°C to 30°C.
- Operating Humidity: 20% to 80%.
Functional Features:
- High-Fidelity Imaging: Utilizes advanced CCD technology to quickly and accurately capture reflected light signals.
- Stable Illumination: The HeNe laser provides excellent monochromaticity and coherence for flawless interference fringe generation.
- Comprehensive Analysis: Delivers detailed topographical maps and surface quality metrics.
Application Scenarios:
Extensively used in the manufacturing of precision optics, semiconductor wafer inspection, aerospace component testing, and academic research laboratories.
Performance Parameters:
- Environmental Tolerance: Operates reliably within standard cleanroom or laboratory climate controls (15-30°C).
- Measurement Speed: Optimized for high throughput without sacrificing nanoscale accuracy.
Material Composition:
Housed in a rigid, thermally stable enclosure with precision-ground optical mounts to prevent mechanical drift during measurements.
Structural Features:
Features an integrated optical head, precision XYZ translation stages for sample positioning, and a dedicated electronics processing unit.
Working Principle:
Employs phase-shifting interferometry. The HeNe laser beam is split into reference and test beams; their recombination creates interference fringes captured by the CCD, which are then mathematically reconstructed into a 3D surface map.
Installation Requirements:
Must be placed on a dedicated vibration-isolation optical table. Maintain strict environmental controls (15-30°C, 20-80% RH) to prevent thermal expansion and air turbulence.
Usage Precautions:
Never touch the optical surfaces directly. Ensure the sample is clean before measurement to avoid scratching the optics or introducing false data. Allow sufficient warm-up time for laser stabilization.
