MKS 979B-01-0013
MKS 979B-01-0013 - Image 2

MKS 979B-01-0013

Product Introduction:
The MKS 979B-01-0013 is a high-precision vacuum pressure sensor belonging to the MKS Instruments Baratron® series, designed for critical vacuum measurement and control applications. This capacitance manometer delivers exceptional accuracy and long-term stability in demanding industrial and research environments, making it a preferred choice for semiconductor manufacturing, thin film deposition, and precision gas measurement processes. The sensor employs proven capacitance-based pressure measurement technology to provide highly reliable and repeatable readings in high vacuum conditions.

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Description

MKS 979B-01-0013

Technical Specifications:

  • Brand: MKS Instruments
  • Model: 979B-01-0013
  • Product Series: Baratron® Capacitance Manometers
  • Product Type: Capacitance Manometer (Vacuum Pressure Sensor)
  • Measurement Range: 0-100 Torr
  • Accuracy: 0.05% of reading
  • Long-term Stability: 0.01% per year
  • Repeatability: 0.02%
  • Response Time: Less than 1 millisecond
  • Output Signal: 0-5V DC analog output
  • Supply Voltage: 24V DC
  • Operating Temperature: Typically 45°C (sensor head heated for stability)
  • Connection Type: VCR or Conflat flange (vacuum compatible)
  • Origin: United States

Functional Features:

  • Ultra-high precision with 0.05% reading accuracy for critical process control
  • Exceptional long-term stability of 0.01% per year minimizes recalibration frequency
  • Fast response time under 1 millisecond enables real-time process monitoring
  • Heated sensor head design eliminates effects of ambient temperature fluctuations
  • Gas-independent measurement principle ensures accurate readings regardless of gas composition
  • Zero drift compensation for sustained measurement reliability
  • Rugged construction suitable for harsh industrial environments
  • Compatible with standard vacuum system interfaces and control equipment
  • Proven Baratron® technology with decades of field-proven performance

Application Scenarios:

  • Semiconductor Manufacturing: Etching, deposition, ion implantation, and other precision fabrication processes
  • Thin Film Deposition: PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition), and ALD (Atomic Layer Deposition) processes
  • Vacuum Coating: Optical coating, metal coating, and decorative coating applications
  • Gas Analysis: Chromatography, mass spectrometry, and infrared spectroscopy instruments
  • Research Laboratories: Physics, chemistry, and materials science vacuum measurement experiments
  • Vacuum Furnace: Pressure monitoring and control in heat treatment processes
  • Leak Detection Systems: Precision pressure measurement for helium leak detection

Performance Parameters:

  • Measurement Range: 0-100 Torr absolute pressure
  • Accuracy: 0.05% of reading
  • Long-term Stability: 0.01% per year
  • Repeatability: 0.02%
  • Response Time: Less than 1 millisecond
  • Output Signal: 0-5V DC linear output
  • Supply Voltage: 24V DC ±10%
  • Operating Temperature Range: 0°C to 50°C (electronics), 45°C (sensor head)
  • Storage Temperature Range: -20°C to 70°C
  • Warm-up Time: Approximately 30 minutes for specified accuracy

Material Composition:

  • Sensor diaphragm: High-purity alumina ceramic or nickel-based alloy
  • Sensor body: Stainless steel (316L) for vacuum compatibility
  • Seals: Metal gaskets (gold-plated or silver-plated) for ultra-high vacuum integrity
  • Electronic components: Industrial-grade integrated circuits and precision resistors
  • Housing: Aluminum alloy with protective coating
  • Connection fittings: Stainless steel VCR or Conflat flange

Structural Features:

  • Compact cylindrical sensor head design for easy installation in vacuum systems
  • Separate electronics housing connected via cable for flexible mounting
  • Heated sensor chamber maintains constant operating temperature
  • Hermetically sealed reference vacuum chamber on one side of the diaphragm
  • Precision-machined diaphragm with controlled tension for linear response
  • Robust electrical connector for reliable signal transmission
  • Status indicator LEDs for power and operational monitoring
  • Calibration access port for field adjustment if required

Working Principle:
The MKS 979B operates on the capacitance manometer principle. The sensor contains a thin, tensioned metal or ceramic diaphragm that separates two chambers: one exposed to the process pressure being measured, and the other containing a sealed high vacuum reference. When process pressure is applied, the diaphragm deflects proportionally to the pressure difference. This deflection changes the capacitance between the diaphragm and a fixed electrode positioned behind it. The capacitance change is detected by a precision bridge circuit and converted into an electrical signal. The electronics amplify and linearize this signal, producing a 0-5V DC output that is directly proportional to the applied pressure. The sensor head is heated to a constant temperature (typically 45°C) to eliminate errors caused by ambient temperature variations and to prevent condensation of process gases on the diaphragm.

Installation Requirements:

  • Mount the sensor head directly to the vacuum chamber using appropriate VCR or Conflat fittings
  • Ensure all vacuum connections are properly sealed with compatible metal gaskets
  • Position the sensor head vertically when possible to minimize contamination accumulation
  • Maintain adequate clearance around the sensor for heat dissipation
  • Connect the electronics housing in a location protected from excessive heat and vibration
  • Use shielded cables for signal transmission to minimize electromagnetic interference
  • Ensure proper grounding of both the sensor and connected equipment
  • Allow minimum 30-minute warm-up period before taking precision measurements
  • Follow MKS official installation manual and vacuum system safety procedures
  • Install isolation valves if sensor maintenance without breaking vacuum is anticipated

Usage Precautions:

  • Do not exceed the specified pressure range to prevent diaphragm damage
  • Avoid exposing the sensor to corrosive gases beyond its material compatibility specifications
  • Handle the sensor carefully; the diaphragm is sensitive to mechanical shock and overpressure
  • Perform regular zero calibration checks to maintain measurement accuracy
  • Keep the sensor head heated during operation; do not power off the heater during vacuum processes
  • Protect the sensor from particulate contamination; install filters if necessary
  • Store in a clean, dry environment when not in use
  • Use only genuine MKS replacement parts and accessories
  • Record calibration dates and maintain a calibration schedule
  • Monitor for signs of diaphragm degradation such as increased zero drift or nonlinearity
  • Ensure supply voltage remains within specified limits to prevent electronics damage
  • Follow proper vacuum system venting procedures to avoid sudden pressure shocks

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