Description
PFEIFFER EVR116
Technical Specifications:
- Nominal Flange Size: DN16 ISO-KF
- Valve Type: Normally closed electromagnetic vacuum valve
- Actuator Power: 24 VDC solenoid coil
- Leak Rate: <1×10⁻⁹ mbar·l/s
- Max Operating Pressure: 1 bar absolute
- Operating Temperature: 10 °C to +40 °C
- Storage Temperature: -20 °C to +70 °C
- Sealing Material: FKM fluororubber seal
- Valve Body Material: Stainless steel
- Mounting: Direct flange mounting on vacuum pipeline
Function Features:
- Normally closed design for passive safety isolation when power loss
- Fast opening and closing response for vacuum line control
- High vacuum tight sealing with low leak rate
- Compact inline flange structure for vacuum pipeline integration
- Solenoid coil control by PLC digital output signal
- Resistant to common inert gas and clean process gas
- Visual indicator to show valve open / closed status
- Low maintenance for clean vacuum applications
Application Scenarios:
- Laboratory vacuum analytical equipment
- Thin film vacuum coating systems
- Semiconductor process vacuum pumping lines
- Mass spectrometer vacuum chamber isolation
- Industrial vacuum leak detection systems
Material Composition:
- Valve Body: 316L stainless steel
- Solenoid Housing: Aluminum alloy
- Sealing Element: FKM fluororubber O-ring
- Solenoid Coil: Copper winding with high temperature insulation
- Internal Valve Piston: Stainless steel with guide sleeve
Structural Features:
- Inline straight through pipeline structure with DN16 KF flange ports
- Solenoid actuator mounted on valve body top
- Internal piston and sealing seat for gas path on/off control
- External visual status indicator pin
- KF quick clamp flange connection for vacuum pipeline assembly
Working Principle: When 24 VDC power is applied to solenoid coil, electromagnetic force pulls internal piston upward, valve sealing seat lifts and vacuum gas path opens. When power supply is cut off, spring force pushes piston down to press seal against valve seat, gas path closes and vacuum pipeline is isolated. The FKM seal provides high vacuum tightness. The mechanical indicator pin moves with piston to show valve state visually.
Installation Requirements:
- Install valve on vacuum pipeline with KF flange and metal centering ring
- Use proper torque for KF clamp to avoid seal damage and leakage
- Keep valve body in suitable orientation, avoid liquid condensate accumulation inside valve
- Route solenoid control cable away from high voltage and high heat sources
- Install protective earth connection for valve metal body
- Keep valve away from corrosive gas and particulate contamination
Usage Notes:
- Only use for clean gas application, particle contamination will damage sealing surface
- Verify leak tightness after installation before vacuum pumping
- Do not exceed maximum operating pressure rating
- Disconnect 24 VDC power before disassembling valve body
- Replace FKM O-ring periodically for long term operation
- Prevent liquid from entering valve cavity
