Description
Zygo 7702
Technical Specifications:
- Brand: Zygo
- Model: 7702
- Product Type: Optical Metrology / Interferometer
- Measurement Principle: Phase-shifting interferometry
Functional Features:
- Nanometer Accuracy: Provides sub-nanometer vertical resolution for surface measurements.
- Comprehensive Analysis: Measures flatness, roughness, wavefront error, and surface form.
- Advanced Software: Includes powerful analysis tools for data visualization, filtering, and reporting.
Application Scenarios:
Essential in semiconductor lithography optics manufacturing, precision lens fabrication, aerospace mirror production, and scientific research laboratories.
Performance Parameters:
- Vertical Resolution: Sub-nanometer measurement capability.
- Lateral Resolution: High-resolution camera for detailed surface mapping.
- Measurement Speed: Fast phase-shifting acquisition for efficient testing.
Material Composition:
Precision optical components including reference flats, laser source, and high-resolution CCD/CMOS sensor. Housed in a vibration-isolated optical bench.
Structural Features:
Rigid optical table with adjustable leveling. Features precision alignment stages and motorized focus mechanisms.
Working Principle:
Splits a coherent laser beam into reference and test paths. Recombines the beams to create interference fringes, which are analyzed to reconstruct the surface topography with nanometer precision.
Installation Requirements:
Install on a vibration-isolated optical table in a temperature-controlled, clean environment. Protect from air currents and acoustic noise.
Usage Precautions:
Handle optical components with extreme care using proper cleaning procedures. Allow thermal stabilization before critical measurements. Perform regular system calibration and verification.
