Description
LAM 810-066590-004
Functional Features:
- Ultra-High Vacuum Compatibility: Designed to maintain base pressures in the 10^-9 Torr range.
- Fast Switching: Pneumatic or motorized actuation for rapid chamber pump-down and isolation.
- High Cycle Life: Engineered for millions of cycles without degradation in sealing performance.
Application Scenarios:
Used in load locks, main chamber isolation, and exhaust throttling systems in semiconductor fabrication tools.
Performance Parameters:
- Leak Rate: Below detectable limits for ultra-high vacuum applications.
- Actuation Speed: Sub-second opening and closing times.
Material Composition:
Anodized aluminum body, stainless steel bellows or elastomer seals, and precision-machined internal components.
Structural Characteristics:
Compact, self-contained actuator module with integrated position feedback sensors and pneumatic/electrical connectors.
Working Principle:
Converts pneumatic pressure or electrical motor torque into precise linear or rotary motion to open or close the valve seat, maintaining the desired chamber pressure.
Installation Requirements:
Use clean, dry compressed air for pneumatic actuators. Ensure mating flange surfaces are perfectly clean and undamaged before assembly.
Usage Precautions:
Do not exceed the maximum actuation pressure. Inspect seals regularly for wear or chemical degradation.
