Description
MKS 220DD-00100A2B
Technical Specifications:
- Brand: MKS Instruments
- Model: 220DD-00100A2B
- Product Type: Digital Mass Flow Controller
- Technology: Thermal Mass Flow Sensing
Functional Features:
- High Accuracy: Delivers exceptional flow accuracy and repeatability for precise process control.
- Fast Response Time: Rapid valve actuation and signal processing for dynamic flow adjustments.
- Digital Communication: Supports digital interfaces for seamless integration with modern equipment controllers.
- Wide Turndown Ratio: Maintains accuracy across a broad range of flow rates.
Application Scenarios:
Extensively used in semiconductor etch and deposition tools, analytical instruments, and specialized chemical processing equipment.
Performance Parameters:
- Accuracy: Typically ±1% of reading or ±0.5% of full scale.
- Response Time: Millisecond-level valve response for tight closed-loop control.
Material Composition:
Wetted parts constructed from 316L stainless steel, nickel, or specialized alloys. Features high-reliability elastomer or metal-seal valves.
Structural Characteristics:
Compact, modular design with standard VCR or Swagelok fittings. Features an integrated digital display and status LEDs.
Working Principle:
Gas flows through a heated sensor tube. The temperature differential created by the flowing gas is measured and converted to a mass flow signal. A control valve adjusts the flow to match the user’s setpoint.
Installation Requirements:
Install in the correct flow direction as indicated on the body. Use clean, dry gas and install upstream filtration. Ensure proper electrical grounding.
Usage Precautions:
Never exceed the maximum rated pressure or flow. Purge the system before introducing corrosive or condensable gases. Perform regular zero and span calibrations.
