Description
MKS T3BIB-29916
Technical Specifications Absolute pressure measurement type; Capacitance diaphragm sensing principle; Analog signal output; Operating temperature range 0°C to +50°C; Metal wetted material; Vacuum and pressure compatible gas medium; Electrical connector interface; Threaded process port.
Functional Features High precision absolute pressure measurement; Excellent repeatability for low pressure vacuum range; Built-in temperature compensation circuit reduces thermal drift; Corrosion resistant wetted components; Analog output directly proportional to measured pressure value; Stable long-term measurement performance.
Application Scenarios Semiconductor thin film deposition vacuum chamber; Etching process vacuum monitoring; Analytical instrument vacuum system; Vacuum coating equipment; Mass spectrometer vacuum chamber; Industrial high vacuum process control.
Performance Parameters Measurement linearity maintains high precision; Temperature compensation eliminates thermal measurement drift; Diaphragm deformation response fast; Zero point stability remains consistent over long operation; Anti-vibration performance adapts to process tool environment.
Material Composition Stainless steel process wetted body; Inconel alloy sensing diaphragm; Glass insulating component; Precision capacitance circuit board; Metal electrical connector; Protective metal outer shell.
Structural Features Cylindrical compact sensor body; Threaded gas inlet port on bottom; Internal reference vacuum cavity sealed permanently; Thin sensing diaphragm separates reference cavity and process gas; Top mounted electrical connector for signal and power supply.
Working Principle A thin metal diaphragm forms one plate of a precision capacitor. The reference cavity on one side of diaphragm is sealed at ultra-high vacuum. Process gas pressure applied on opposite side causes diaphragm deflection. Capacitance value changes with diaphragm displacement. Internal circuit converts capacitance variation into standard analog signal proportional to absolute pressure value.
Installation Requirements Install transducer with specified orientation; Use clean vacuum fitting for process port connection; Eliminate gas leakage at thread connection; Route signal cable away from high power cables; Stabilize ambient temperature near transducer.
Precautions for Use Avoid exposing sensor to particulate contamination; Prevent pressure overrange which causes permanent diaphragm damage; Do not use for gas that chemically attacks wetted metal; Perform zero calibration periodically; Keep process pipeline clean before connection.
