Description
ZYGO ZMI-4104
Technical Specifications Brand: Zygo Model: ZMI-4104 Measurement Technology: Heterodyne laser interferometry Measurement Resolution: Nanometer scale Interface: Digital communication and encoder output interface Operating Temperature: 18°C to 28°C Humidity: 20% to 80% non-condensing Mounting: Cabinet rack mounting
Functional Features Decodes heterodyne laser interference signals from optical interferometer heads. Provides ultra-high resolution linear displacement and angular position measurement. Digital output of position measurement data for host control system. Integrated signal monitoring for laser power and optical signal quality. Real-time data output for closed-loop precision motion control. Diagnostic function reports optical signal attenuation and hardware fault.
Application Scenarios Semiconductor wafer stepper positioning, ultra-precision coordinate measuring machines, optical metrology equipment, high-precision linear stage control, aerospace component precision inspection systems.
Performance Parameters Nanometer level displacement measurement resolution. High measurement update rate for fast moving precision stages. Low measurement noise for ultra-precision positioning control. Continuous signal quality monitoring for laser optical path. Stable measurement performance under controlled temperature environment.
Material Composition Housing: Sheet metal steel rack mount enclosure. PCB: FR4 high precision multilayer printed circuit board. Core Components: Photodiode signal receiver chips, high speed signal processing FPGA, communication interface chips, power regulation circuits. Front Panel: Reinforced plastic with LED status indicators. Rear Panel: Metal panel with optical signal input ports and data communication connectors.
Structural Features Standard rack mount rectangular enclosure. Front panel with LED indicators for power, laser signal and fault status. Rear panel fitted with optical fiber ports and electrical data connectors. Internal PCB fixed to metal chassis with mounting screws. Metal chassis provides electromagnetic shielding for weak optical signal circuits.
Working Principle Heterodyne laser beam travels through interferometer optics and reflects from measurement target mirror. Return optical signal enters ZMI-4104 controller through optical fiber. Photodetector converts optical interference signal into electrical signal. High speed digital circuit processes beat frequency signal and calculates displacement change based on phase shift of interference fringe. Digital position measurement value transmits to host motion controller for closed-loop positioning.
Installation Requirements Mount controller inside temperature stabilized instrument cabinet. Connect optical fiber cables between interferometer optical head and controller optical ports. Connect digital communication cable to host motion control system. Stabilize cabinet temperature before performing measurement calibration. Verify optical signal strength after optical path installation. Complete measurement system calibration before formal operation.
Usage Notes Avoid bending optical fiber cable below minimum bend radius. Keep optical connector end face clean and free of dust contamination. Maintain stable ambient temperature around controller and optical path. Do not expose optical ports to direct strong ambient light. Check optical signal intensity regularly during long term operation.
